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The standard electric power on the NIR laser nevertheless has the possible to generally be improved to tens of watts which include 70 W [26] Should the double-move configuration may very well be utilized for the Yb:YAG SCF amplifier phase. That's why, In the event the conversion performance of 31% from NIR to DUV could possibly be still taken care of at this higher electric power situation, the normal output energy on the DUV laser at 258 nm could be over twenty W, which might certainly be a outstanding electric power degree to the DUV laser and produce the unanticipated DUV laser machining outcomes. Additionally, for top-energy DUV laser, the UV injury on the nonlinear crystal, such as the Home windows for CLBO crystal plus the mirrors, is an additional significant parameter for long lasting and secure Procedure.

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Mainly because of the thermal lens influence while in the sound-state lasers, Should the heating administration is inadequate, It's not necessarily effortless to obtain the reliable-condition laser using a substantial electrical power and a significant beam top quality simultaneously. Just more info lately, with the development of the thin disk laser and one-crystal fiber (SCF) laser, a substantial-energy laser at the basic wavelength (one μm) were understood with a very good beam high quality Despite a TEM00 method beam [four,24], which might be fantastic candidates for the elemental from the DUV laser era. Another prospect for the elemental is the high-power fiber laser which could be realized by coherent beam mix with M2 price a lot less than one.

On the opposite aspect, the ability scaling in the NIR laser is an additional factor to improve the regular electricity from the 193-nm DUV laser. Due to the not enough the large-electric power amplification Remedy of the NIR laser (one example is at 1553 nm), nonlinear frequency processes for instance optical parameter oscillation (OPO) might be placed on create a wavelength converter by shifting the wavelength from 1 μm to the specified wavelength in addition to acquiring relative bigger electrical power [21]. A short while ago, a diamond Raman laser confirmed its potential in achieving a substantial power as well as a superior conversion efficiency on the 1st Stokes with the one-μm laser [22,23], which implies the possibility to get utilized within the 193-nm DUV laser technology thanks to its superior Raman achieve and huge frequency shift.

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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the simplest non-linear crystal which generates ultraviolet harmonics of your Nd:YAG essential laser wavelength. To be able to greatly enhance the harm threshold, reduced CLBO surface roughness, by ultra-precision machining, is necessary. As the CLBO crystal has uncomplicated hydroscopic reaction and micro scratches in machining, ultra-exact machining on the CLBO crystal can be a challenging technical challenge.

The beam profile revealed in Figure 7b shown a superb beam quality as one of many deserves of Raman laser, which might be beneficial to make a 193-nm DUV laser with a top quality beam.

Its UV absorption edge reaches 180 nm. The effective nonlinear optical coefficient of CLBO for frequency doubling at 1064nm is about 2 times as substantial as that of KDP. CLBO crystals might be grown from the stoichiometric soften with decrease viscosity.

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